Minnich Group
CALIFORNIA INSTITUTE OF TECHNOLOGY

Welcome to the
Minnich Group
Our group focuses on the growth and processing of thin-film electronic and quantum materials. We work at the intersection of materials science, engineering, and physics. We are part of a vibrant quantum science and engineering environment at Caltech.
Our group is committed to advancing the success of all members of our division, Caltech, and research communities.
Group News
Latest publications
David Catherall's paper on characterization of ultrathin nickel films deposited by thermal laser evaporation is published in Applied Physics Letters
February 24, 2026
Ivy Chen's paper on directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma is published in JVSTA
January 22, 2026
Mete Bayrak's paper on atomic layer etching of InGaAs using sequential exposures of atomic hydrogen and oxygen gas is published in Semiconductor Science and Technology
November 13, 2025
Happenings
Congratulations to David Catherall for winning Best Student Paper Award at ICMBE for TLE!
August 3, 2026
Congratulations to Ivy Chen for receiving the 2025 Best ALE paper award from AVS! This is a great recognition and a reflection of everyone’s hard work. Thank you!
June 10, 2026
Congrats to HEMT team for paper published in pssa!
April 29, 2026
Congrats to Dr. Catherall!
March 23, 2026
Research
Future transformative solid-state technology exploiting quantum effects such as entanglement will require new methods to grow and process highly delicate quantum materials into functioning devices. Our group’s present research focuses on inventing these methods and applying them to the fabrication of novel solid-state quantum technologies.

We are developing transistor microwave amplifiers with ultra low-noise performance into the millimeter-wave spectrum.

We are developing atomic layer etching processes which will enable subtractive manufacturing of electronic and quantum devices with atomic precision for the first time.

We are developing a new method for the epitaxial growth of thin-film quantum materials by laser-based evaporation of refractory elements.
People

Principal Investigator
Austin J. Minnich
Professor of Mechanical Engineering and Applied Physics

Professional Preparation
BS University of California Berkeley, 2006
MS Massachusetts Institute of Technology, 2008
PhD Massachusetts Institute of Technology, 2011
Appointments
Professor, California Institute of Technology, 2017-Present
Assistant Professor, California Institute of Technology, 2011-2017
Click here for a copy of Austin's CV
Deputy Chair, Division of E&AS, 2022 - Present
Current group members
Research scientist

Research scientist. PhD, Caltech Research interests: Low-noise amplifiers, atomic layer etching Joined group: 2021

Research scientist. PhD, Caltech Research interests: Precision measurement, low-noise amplifiers, nanofabrication Joined group: 2021
Postdoc
Graduate students

Postdoc. PhD, UCSB Research interests: Atomic layer etching, superconducting quantum devices Joined group: 2025

BA, Harvard University Research interests: Thermal laser epitaxy Joined group: 2025

BS, National Taiwan University Research interests: Atomic layer processing Joined group: 2025

BS, Rensselaer Polytechnic Institute Research interests: Thermal laser epitaxy Joined group: 2024

BTech, Indian Institute of Technology, Delhi Research interests: Atomic layer etching Joined group: 2024

BS, University of Science and Technology of China Research interests: Atomic layer etching, thermal laser epitaxy Joined group: 2024

BS, Massachusetts Institute of Technology Research interests: Nanofabrication, low noise amplifiers Joined group: 2024

BS, University of Texas at Austin Research interests: Atomic layer etching Joined group: 2024

BS, Harvey Mudd College Research interests: Atomic layer etching Joined group: 2022

BS, University of Rochester Research interests: Low noise amplifiers, noise in semiconductors Joined group: 2022
Click here to see our group alumni.
Teaching
Fall 2025
APh 105a: States of Matter
Thermodynamics and statistical mechanics, with emphasis on gases, liquids, materials, and condensed matter. Effects of heat, pressure, and fields on states of matter are presented with both classical thermodynamics and with statistical mechanics. Conditions of equilibrium in systems with multiple degrees of freedom. Applications include ordered states of matter and phase transitions.

P: (626)-395-3385
F: (626)-583-4963
Minnich Lab
1200 E. California Blvd, M.C. 104-44
Pasadena, CA 91125






